![M_MC_Pair Mass flow meter 100 SCCM](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/M_MC_Pair.webp)
Mass Flow Meters
![M-series 1 Standard mass flow meter](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/M-series-1.webp)
M Series
For most gas measurement
most versatile
- 0.5 SCCM- 10,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
- ±(0.1% of reading + 0.02% of full scale) repeatability
Spec Sheets
![M-series 1 Standard mass flow meter](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/M-series-1.webp)
MQ Series
Measure flow rates at higher pressures
Highest pressure rating
- 10 SCCM- 10,000 SLPM options
- 11.5-320 PSIA operating
- ±0.5% of reading accuracy
- ±0.1% of full scale repeatability
Spec Sheets
![BIO-Meter_150px BIO series meter for bioreactors and fermenters](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/BIO-Meter_150px.webp)
BIO Series
Measure gases into and out of bioreactors + fermenters
ASME BPE compliant
- Long-term stability
- Robust, compliant materials
- Designed for scalability (10,000:1 operating range)
Spec Sheets
Mass Flow Controllers
![MC-Series Standard mass flow gas meter](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MC-Series.webp)
MC Series
For most gas control
Fast proportional control
- 0.5 SCCM- 10,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
- 0.01–100% of full scale control
- 30 ms control response
Spec Sheets
![MCQ-Series Anti-corrosive, high pressure mass flow controller](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCQ-Series.webp)
MCQ Series
Control gas at higher pressures
Highest pressure rating
- 10 SCCM- 10,000 SLPM options
- 11.5-320 PSIA operating
- ±0.6% of reading accuracy
- 0.5% – 100% of full scale control
- 100 ms control response
Spec Sheets
![BIOC-Series BIO series meter for bioreactors and fermenters](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/BIOC-Series.webp)
BIOC Series
Control gases into bioreactors + fermenters
ASME BPE compliant
- Long-term stability
- Robust, compliant materials
- Designed for scalability (10,000:1 operating range)
Spec Sheets
![MCD-Series Mass flow controller for bi-directional flow applications](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCD-Series.webp)
MCD Series
Control flow in two directions
Bidirectional Control
- 0.5 SCCM- 3,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
Spec Sheets
![MCT-Series Mass flow controller with bi-valve for selectable steam control](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCT-Series.webp)
MCT Series
Control two gas streams
two gas sources, one device
- 98 gases
- 0.5 SCCM- 10,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
Spec Sheets
![MCV-Series Mass flow controller for vacuum applications](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCV-Series.webp)
MCV Series
Control gas at vacuum pressures
Pnuematic shutoff valve
- Ensure process integrity
- 0.5 SCCM- 20 SLPM options
- ±(0.1% of reading + 0.02% of full scale) repeatability
Spec Sheets
![MCE-Series Mass flow controller for SEMI vacuum applications](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCE-Series.webp)
MCE Series
Control gases at vacuum with SEMI form factor
SEMI form factor -1/4″ VCR
- 0.5 SCCM – 20 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
- Drop-in replacement
- -SFF option: machined fittings
Spec Sheets
Build Options for Mass Flow Meters and Controllers
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
Downloads
Manuals
M/MC Series Operating ManualLatest – 10v firmware
M Series Operating ManualLegacy – 8v firmware (2020)
M Series Operating ManualLegacy – 9v firmware (2021)
MC Series Operating ManualLegacy – 8v firmware (2020)
MC Series Operating ManualLegacy – 9v firmware (2021)
Brochures
M/MC Series Brochure
Software/Utilities
FlowVision 2.0
Serial Terminal Utility
Serial Address Dump Utility
Serial Port Troubleshooter Utility
Python Library
Liquid Flow Meters & Liquid Flow Controllers
Liquid flow meters and liquid flow controllers use either Coriolis or laminar flow technology to accurately control liquid flows across a wide range of applications.
Pressure Controllers & Transducers
Alicat offers pressure controllers and pressure transducers for use in flowing, dead-ended, or vacuum applications.
Custom Instrumentation
Order mass flow controllers and meters custom-build to your specific application needs.
Technical Reference
Find guides, tutorials, pinout diagrams, and industrial protocol resources for your Alicat instrument.
Applications
![Gas chromatography column inside a GC analyzer](https://www.alicat.com/wp-content/uploads/2024/05/gas_chromatography_column_carrier_gas_control-scaled.webp)
Gas chromatography processes
![DALL-E geothermal energy extraction illustration](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/04/DALL·E-2024-02-23-15.59.51-A-simple-illustration-depicting-geothermal-energy-extraction-showcasing-a-cross-section-of-the-Earths-layers.-On-the-surface-theres-a-geothermal-p.webp)
Mining, oil and gas, and hydrogen production
![Bioprocessing mass flow controller](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/04/Bioreactor_Bioprocess-1.webp)
Bioreactors and fermentation
![Diamond mass flow controllers](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/04/Diamond-768x456-1.webp)
Lab-grown diamonds with chemical vapor deposition
FastTrack Ordering
METER RANGES
2 SCCM - 500SLPM
CONTROLLER RANGES
2 SCCM - 100SLPM
Service and Support
Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade,
you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.