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M Series Mass Flow Meters

Mass Flow Meters with Laminar Differential Pressure Technology

Mass flow meters using laminar differential pressure (DP) technology from Alicat

Our most versatile mass flow meters because of the highly responsive, multivariate technology of Laminar DP. Great for versatility in research environments, with the precision and dependability for industrial applications.

Laminar DP (differential pressure) mass flow measurement technology that Alicat pioneered
98 standard (up to 130) pre‑calibrated gas choices — switch without losing accuracy
Measures mass flow, volumetric flow, temperature, and pressure
As high as 0.01 – 100% measurement range (10,000:1 turndown)
Limited Lifetime Warranty

Operating manuals, brochures, software, and utilities →

Full Scale Flow Ranges

0.5 SCCM – 10,000 SLPM

OPERATING PRESSURE RANGE

11.5 – 320 PSIA

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Looking for a mass flow controller instead?

M Series Meter

For most gas measurement

most versatile

0.5 SCCM – 10,000 SLPM options
11.5 – 160 PSIA operating
Accuracy as good as ± 0.5% of reading
± (0.1% of reading + 0.02% of full scale) repeatability

Spec Sheets

Mass flow meter - MQ Series (higher pressure applications)

MQ Series Meter

Measure flow rates at higher pressures

Highest pressure rating

10 SCCM – 10,000 SLPM options
11.5 – 320 PSIA operating
Accuracy as good as ± 0.6% of reading or ±0.1% of full scale, whichever is greater
± 0.1% of full scale repeatability

Spec Sheets

corrosion resistant Mass Flow Meter - Alicat MS Series

MS Series Meter

For a wider range of gases

Corrosion-Resistant Wetted materials

130 gases, including corrosives
0.5 SCCM – 10,000 SLPM
11.5 – 160 PSIA
± 0.4% of reading and ± 0.2% of full scale accuracy

Spec Sheets

0.5 SCCM – 10,000 SLPM

Mass flow meter for bioreactors and fermenters - BIO Series from Alicat

BIO Series Meter

Measure gases into and out of bioreactors + fermenters

ASME BPE compliant

Also uses laminar differential pressure mass flow meter technology
Long-term stability
Robust, compliant materials including USP Class VI or USPVI elastomers
Designed for scalability (10,000:1 operating range)

Spec Sheets

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Available Variants

MW Series Meter

Low pressure drop laminar DP mass flow meters

Build Options for Laminar Differential Pressure Mass Flow Meters

Communication Protocols

RS-232 Serial (default)
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
IO-Link

Displays

Backlit monochrome (default) or TFT color; integrated or panel-mount; none

Process Connections

10-32, NPT, SAE, BSPP, VCRM, VCO, Compression

Ingress Protection

IP40 (default); IP66, IP67

Hazardous Environment Ratings

CSA Class 1 Div 2, ATEX Class 1 Zone 2; uses Legacy – 8v firmware (2020) manual
For explosive environments, see IS-Max Series

Humid Gases

Relative humidity compensation

Measurement Technology

Laminar differential pressure (laminar DP) flow sensing with temperature and pressure correction.

FastTrack Ordering

Mass flow instruments that ship in just 3-5 business days.

CALIBRATION

Standard or High Accuracy

DISPLAY

Monochrome, Color, or None

PROTOCOL

Analog, RS-232, RS-485, Modbus RTU, or PROFIBUS

CONNECTOR

MD8, Locking Industrial, DB9M, DB15

FITTINGS

NPT

METER RANGES

2 SCCM - 500 SLPM

CONTROLLER RANGES

2 SCCM - 100 SLPM

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Each product is made-to-order.  Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.

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