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Vacuum Mass Flow Controllers

Mass Flow Controllers for Sub‑Atmospheric Flow Systems

Mass flow controller products from Alicat for vacuum processes

Vacuum mass flow controllers are preconfigured to easily fit, and work, in vacuum processes—like CVD, ALD, PVD and coating. These instruments measure and control gas flow from 0.5 SCCM full scale to 20 SLPM full scale.

Ultra-fast response time as low as 30 ms
Up to 130 pre-loaded gas calibrations — fewer spares: switch without losing accuracy
Use fewer units: As high as 0.01 – 100% measurement and control range (10,000:1 turndown)
Accuracy as good as ± 0.4% of reading and ± 0.2% of full scale
Laminar differential pressure (DP) mass flow measurement technology
Measures mass flow, volumetric flow, temperature, and pressure
Limited Lifetime Warranty

Operating manuals, brochures, software, and utilities →

Full Scale Flow Ranges

0.5 SCCM – 20 SLPM

OPERATING PRESSURE RANGE

11.5 – 160 PSIA

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Looking for a mass flow meter instead?

MCV Series Controller

Vacuum mass flow controllers

Pnuematic shutoff valve

0.5 SCCM – 20 SLPM options
0.01% – 100% of full scale (10,000:1 turndown ratio)
Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
98 preloaded selectable gas calibrations
Integrated pneumatic valve
Pneumatic valve leak integrity: 1 x 10^-9 atm-cc/sec helium max
Repeatability as good as ± (0.1% of reading + 0.02% of full scale)

Spec Sheets

SFF Series Controller

Control gas at vacuum pressures with SEMI form factor

SEMI standard footprint

0.5 SCCM to 20 SLPM full scale ranges
0.01% – 100% of full scale (10,000:1 turndown ratio)
Accuracy as good as ± (0.4% of reading + 0.2% of full scale)
98 preloaded selectable gas calibrations
−10°C to +60°C operating temperature
Machined fittings for fewer sealing surfaces
Replaces MCE Series controllers

Spec Sheets

Corrosion resistant SEMI form factor mass flow controller

MCES Series Controller

SEMI form factor corrosion‑resistant control of gas at vacuum

Corrosion-resistant SEMI footprint

0.5 SCCM to 20 SLPM full scale ranges
0.01% – 100% of full scale (10,000:1 turndown ratio)
Accuracy as good as ± (0.4% of reading + 0.2% of full scale)
128+ preloaded selectable gas calibrations
Repeatability: ± 0.2% of full scale
Operating temperature: −10°C to +60°C

Spec Sheets

0.5 SCCM – 20 SLPM

MCVS Series Controller

Corrosion-resistant vacuum mass flow controllers

Corrosion-resistant with shut-off valve

0.5 SCCM to 20 SLPM full scale ranges
1% – 100% of full scale steady state control range
Accuracy as good as ± 0.4% of reading and ± 0.2% of full scale
Compatible gases: 128+ preloaded selectable gas calibrations
Pneumatic valve leak integrity: 1 x 10^-9 atm-cc/sec helium max
± 0.2% of full scale repeatability

Spec Sheets

0.5 SCCM – 20 SLPM

Build Options

Communication Protocols

RS-232 Serial (default)
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
IO-Link

Displays

Backlit monochrome (default) or TFT color; integrated or panel-mount; none

Process Connections

VCR (default), Compression, or VCO

Ingress Protection

IP40 (default); IP66, IP67

Hazardous Environment Ratings

CSA Class 1 Div 2, ATEX Class 1 Zone 2; uses Legacy – 8v firmware (2020) manual
For explosive environments, see IS-Max Series

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Each product is made-to-order.  Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.

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