Products » Gas Flow » Mass Flow Controller » BASIS Series Compact Mass Flow Controllers
BASIS™ Series Small Flow Controllers
Compact MEMS Thermal Mass Flow Controllers perfect for OEM assemblies
These compact mass flow controllers offer the performance of a premier product for processes with space constraints. They fit in the palm of your hand but are built to last. Small and light to save space in cabinets and enclosures, priced for quantity purchases, they are perfect for OEM installations.
- Accurate flow control in a compact, durable, metal flow body
- Run sophisticated flow‑control scripts using a fast, robust Alicat ASCII command set
- Dispense doses and batches with built‑in totalizer
- Switch between 9 gases: Air, N2, O2, CH4, He, H2, Ar, CO2, N2O
- 0.1 – 100% of full scale measurement and control range (1,000:1 turndown)
- Limited Lifetime Warranty
Full Scale Flow Ranges
100 SCCM – 100 SLPM
OPERATING PRESSURE RANGE
0 – 145 PSIG
BASIS Series Controller
Compact mass flow controller
4.52” max width
- Accuracy as good as 1.5% of reading or 0.2% of full scale whichever is greater
- Integrated proportional control valve
- As fast as 100 ms control response
- Convenient status LED
- Easy automation
Spec Sheets
BASIS Series Compact Manifold
Save space with multiple devices
Manifold or gassing module
- Built to your process
- Easily connect to PC or PLC
- Wide range of fittings
Build Options
Communication Protocols
Displays
None
Process Connections
Ingress Protection
Ready for the final details?
Each product is made-to-order. Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.
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