Mass Flow Controller Products
For control of gas flow rates
Mass flow controller products by Alicat deliver accurate measurement and lightning‑fast control. Our wide range of control types built to spec ensures users have the best possible device for their process.
Our options include…
- Mass flow controller products from Alicat use Laminar differential pressure (DP), Coriolis, or MEMS Thermal mass flow sensing technology
- Pre-loaded gas calibrations — switch without losing accuracy
- Ultra-fast response time: flow control as fast as 30 ms
- As much as 0.01 – 100% measurement and control range (10,000:1 turndown)
- All come with digital and analog communications for control
- Limited Lifetime Warranty
A fast, accurate mass flow controller for most applications
Standard MFC, MC Series
- Laminar differential pressure mass flow controllers
- Compatible with 98 gases, 130 gases with corrosion resistant models
- 0.5 SCCM full scale – 10,000 SLPM full scale options
- Live flow, pressure, and temp readings
- High accuracy: as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
- 0.01 – 100% of full scale control
- 30 ms control response
Ultra-low pressure drop mass flow controllers
Whisper™, MCW Series
- As little as 0.07 PSID pressure drop
- Compatible with 98 gases
- 0.5 SCCM full scale – 1,000 SLPM full scale
- Live flow, pressure, and temp readings
- For pressures 11.5 – 60 PSIA
- High accuracy: as good as ± 0.6% of reading or ± 0.1% of full scale, whichever is greater
- 10,000:1 turndown
Fluid-independent mass flow controllers
CODA™, KC Series
- Coriolis measurement technology
- 40 g/h full scale – 300 kg/h full scale
- 4,000 PSIA max
- Corrosive resistant properties
- High accuracy for gas: as good as ± 0.5% of reading or ± 0.05% of full scale, whichever is greater
Intrinsically safe gas flow controllers
IS-Max™, ISMC Series
- For use in explosive atmospheres
- Compatible with 98 gases, stainless steel also available
- 0.5 SCCM full scale – 250 SLPM full scale options
- Live flow, pressure, and temp readings
- 11.5 – 160 PSIA operating
- High accuracy: as good as ± 0.5% of reading and ± 0.1% of full scale
- 10,000:1 turndown
Ultra compact mass flow controllers for OEM applications
BASIS™ Series
- MEMS thermal mass flow controller
- 9 Gases
- 100 SCCM full scale – 100 SLPM full scale
- 0 – 145 PSIG max
- Available as manifold or gassing array
No K-factors needed: 98-128 gas calibrations on board
SEMI/SEMI Vacuum, SFF/MCV Series
- SFF and MCES have SEMI footprint for drop‑in replacement
- 0.5 SCCM full scale – 20 SLPM full scale
- Live flow, pressure, and temp readings
- 160 PSIA max
- Optional pneumatic shutoff valve on downstream side
- External leak rate 1×10-9 atm-cc ⁄ sec
Applications
Gas chromatography processes →
Mining, oil and gas, & hydrogen production →
Bioreactors and fermentation →
Lab-grown diamonds with chemical vapor deposition →
Not sure which mass flow controller is best for your application?
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Flow and pressure instruments crafted to your specifications. Engineered to perform to your unique needs. Customize our products or get wholly new systems—like gas mixers, manifolds, or control loops.
Ready for the final details?
Each product is made-to-order. Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.