Build Options
Communication Protocols
Serial communication over USB
Process Connections
Ingress Protection
Power
4 AA batteries or included AC/DC adapter
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Each product is made-to-order. Alicat’s Applications Engineers are ready to provide expertise and discuss custom options, ensuring the best fit for your needs.
Downloads
Spec Sheets
M Series Spec Sheet 0.5 – 5 SCCM
M Series Spec Sheet 10 SCCM – 20 SLPM
M Series Spec Sheet 50 – 10,000 SLPM
MS Series Spec Sheet All flow ranges
MW Series Spec Sheet 0.5 – 5 SCCM
MW Series Spec Sheet 10 SCCM – 100 SLPM
MW Series Spec Sheet 250 – 1,000 SLPM
Any of the above meters can be used in a PCU kit. PCU kits are subject to slightly increased pressure drop compared to each meter on its own.
Software & Utilities
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Technical documentation