![MS_MCS_Pair Mass flow meter 100 SCCM](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MS_MCS_Pair.webp)
Anti-Corrosive Mass Flow Meters
![MS-Solo_150px Standard mass flow meter](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MS-Solo_150px.png)
MS Series Meter
For most applications
most versatile
- 130 gases, including corrosives
- 0.5 SCCM- 10,000 SLPM
- 11.5-160 PSIA
- ± 0.4% of reading and ± 0.2% of full scale accuracy
Spec Sheets
Anti-Corrosive Mass Flow Controllers
![MCS-1SLPM-D-DB9M-PCA13-P10-A030_WEB-241x300-1 Anti-corrosive Gas Mass Flow controller](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/04/MCS-1SLPM-D-DB9M-PCA13-P10-A030_WEB-241x300-1.webp)
MCS Series Controller
For most applications
integrated pneumatic valve
- 0.5 SCCM- 10,000 SLPM options
- 1 – 100% of full scale control range
- 30 ms control response
Spec Sheets
![MCES-Solo_150px Mass flow controller for SEMI vacuum applications](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCES-Solo_150px.webp)
MCES Series Controller
For SEMI vacuum applications
SEMI form factor -1/4″ VCR
- 0.5 SCCM – 20 SLPM options
- 11.5-160 PSIA operating
- 1 – 100% of full scale control range
- 30 ms control response
- Drop-in replacement
Spec Sheets
![MCVS-Solo_150px Mass flow controller for vacuum applications](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCVS-Solo_150px.webp)
MCVS Series Controller
For vacuum applications
Pnuematic shutoff valve
- Ensure process integrity
- 0.5 SCCM- 20 SLPM options
- ±0.2% of full scale repeatability
Spec Sheets
![MCDS-Solo_150px Mass flow controller for bi-directional flow applications](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCDS-Solo_150px.webp)
MCDS Series Controller
For bi-directional flow applications
Control in both directions
- 0.5 SCCM- 3,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
Spec Sheets
![MCTS-Solo_150px Mass flow controller with bi-valve for selectable steam control](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/MCTS-Solo_150px.webp)
MCTS Series Controller
For selectable steam control
two gas sources, one device
- 0.5 SCCM- 10,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
Spec Sheets
Build Options for Mass Flow Meters and Controllers
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
Downloads
Manuals
MS/MCS Series Operating ManualLatest – 10v firmware
MS Series Operating ManualLegacy – 8v firmware (2020)
MS Series Operating ManualLegacy – 9v firmware (2021)
MCS Series Operating ManualLegacy – 8v firmware (2020)
MCS Series Operating ManualLegacy – 9v firmware (2021)
Brochures
MS/MCS Series Brochure
Software/Utilities
FlowVision 2.0
Serial Terminal Utility
Serial Address Dump Utility
Serial Port Troubleshooter Utility
Python Library
![CODA coriolis mass flow meter](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/Coda-Series.webp)
Liquid Flow Meters & Controllers
Liquid flow controllers use either Coriolis or laminar flow technology to accurately control liquid flows across a wide range of applications.
![Dual valve pressure controller 5 PSIG](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/04/PCD-5PSIG-D_Web.webp)
Pressure Controllers & Transducers
Alicat offers pressure controllers for use in flowing, dead-ended, or vacuum applications.
![](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/05/custom.webp)
Custom Instrumentation
Order mass flow controllers and meters custom-build to your specific application needs.
Technical Reference
Find guides, tutorials, pinout diagrams, and industrial protocol resources for your Alicat instrument.
Applications
![Gas chromatography column inside a GC analyzer](https://www.alicat.com/wp-content/uploads/2024/05/gas_chromatography_column_carrier_gas_control-scaled.webp)
Gas chromatography processes
![DALL-E geothermal energy extraction illustration](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/04/DALL·E-2024-02-23-15.59.51-A-simple-illustration-depicting-geothermal-energy-extraction-showcasing-a-cross-section-of-the-Earths-layers.-On-the-surface-theres-a-geothermal-p.webp)
Mining, oil and gas, and hydrogen production
![Bioprocessing mass flow controller](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/04/Bioreactor_Bioprocess-1.webp)
Bioreactors and fermentation
![Diamond mass flow controllers](https://alicatprod.wpenginepowered.com/wp-content/uploads/2024/04/Diamond-768x456-1.webp)
Lab-grown diamonds with chemical vapor deposition
FastTrack Ordering
METER RANGES
2 SCCM - 500SLPM
CONTROLLER RANGES
2 SCCM - 100SLPM
Service and Support
Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade,
you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.