Stainless Mass Flow Meters and Controllers

MS Series Meter

For most applications

most versatile

• 130 gases, including corrosives
• 0.5 SCCM- 10,000 SLPM
• 11.5-160 PSIA
• ± 0.4% of reading and ± 0.2% of full scale accuracy

Spec Sheets

• 0.5 SCCM – 10,000 SLPM

MCS Series Controller

For most applications

integrated pneumatic valve

• 0.5 SCCM- 10,000 SLPM options
• 1 – 100% of full scale control range
• 30 ms control response

Spec Sheets

• 0.5 SCCM – 10,000 SLPM

MCES Series Controller

For SEMI vacuum applications

SEMI form factor -1/4″ VCR

• 0.5 SCCM – 20 SLPM options
• 11.5-160 PSIA operating
• 1 – 100% of full scale control range
• 30 ms control response
• Drop-in replacement

Spec Sheets

• 0.5 SCCM – 10,000 SLPM

MCVS Series Controller

For vacuum applications

Pnuematic shutoff valve

• Ensure process integrity
• 0.5 SCCM- 20 SLPM options
• ±0.2% of full scale repeatability

Spec Sheets

• 0.5 SCCM – 20 SLPM

MCTS Series Controller

For selectable steam control

two gas sources, one device

• 0.5 SCCM- 10,000 SLPM options
• 11.5-160 PSIA operating
• ±0.5% of reading accuracy

Spec Sheets

• 0.5 SCCM – 10,000 SLPM

MS/MCS Series Operating ManualLatest – 10v firmware

MS Series Operating ManualLegacy – 8v firmware (2020)

MS Series Operating ManualLegacy – 9v firmware (2021)

MCS Series Operating ManualLegacy – 8v firmware (2020)

MCS Series Operating ManualLegacy – 9v firmware (2021)

MS/MCS Series Brochure

FlowVision 2.0

Serial Terminal Utility

Serial Address Dump Utility

Serial Port Troubleshooter Utility

Python Library