M/MC Series

Mass Flow Meters and Controllers with Laminar DP Technology

Our most versatile gas mass flow meters and controllers for most industrial processes and research applications.

  • Laminar differential pressure (DP) mass flow measurement technology
  • 98 pre-loaded gas calibrations – switch without losing accuracy
  • Measures mass flow, volumetric flow, temperature, and pressure
  • Ultra-fast response time as low as 30 ms
  • 0.01-100% measurement and control range (10,000:1 turndown)
  • Limited Lifetime Warranty

FULL SCALE FLOW RANGES

0.5 SCCM – 10,000 SLPM

OPERATING PRESSURE RANGE

11.5 – 320 PSIA

Available variants

Mass flow meter 100 SCCM

Mass Flow Meters

Standard mass flow meter

M Series

For most gas measurement

most versatile

  • 0.5 SCCM- 10,000 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy
  • ±(0.1% of reading + 0.02% of full scale) repeatability

Spec Sheets

Standard mass flow meter

MQ Series

Measure flow rates at higher pressures

Highest pressure rating

  • 10 SCCM- 10,000 SLPM options
  • 11.5-320 PSIA operating
  • ±0.5% of reading accuracy
  • ±0.1% of full scale repeatability

Spec Sheets

BIO series meter for bioreactors and fermenters

BIO Series

Measure gases into and out of bioreactors + fermenters

ASME BPE compliant

  • Long-term stability
  • Robust, compliant materials
  • Designed for scalability (10,000:1 operating range)

Spec Sheets

Mass Flow Controllers

Standard mass flow gas meter

MC Series

For most gas control

Fast proportional control

  • 0.5 SCCM- 10,000 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy
  • 0.01–100% of full scale control
  • 30 ms control response

Spec Sheets

Anti-corrosive, high pressure mass flow controller

MCQ Series

Control gas at higher pressures

Highest pressure rating

  • 10 SCCM- 10,000 SLPM options
  • 11.5-320 PSIA operating
  • ±0.6% of reading accuracy
  • 0.5% – 100% of full scale control
  • 100 ms control response

Spec Sheets

BIO series meter for bioreactors and fermenters

BIOC Series

Control gases into bioreactors + fermenters

ASME BPE compliant

  • Long-term stability
  • Robust, compliant materials
  • Designed for scalability (10,000:1 operating range)

Spec Sheets

Mass flow controller for bi-directional flow applications

MCD Series

Control flow in two directions

Bidirectional Control

  • 0.5 SCCM- 3,000 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy

Spec Sheets

Mass flow controller with bi-valve for selectable steam control

MCT Series

Switch between two gas streams

two gas sources, one device

  • 98 gases
  • 0.5 SCCM- 10,000 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy

Spec Sheets

Mass flow controller for vacuum applications

MCV Series

Control gas at vacuum pressures

Pnuematic shutoff valve

  • Ensure process integrity
  • 0.5 SCCM- 20 SLPM options
  • ±(0.1% of reading + 0.02% of full scale) repeatability

Spec Sheets

Mass flow controller for SEMI vacuum applications

MCE Series

Control gases at vacuum with SEMI form factor

SEMI form factor -1/4″ VCR

  • 0.5 SCCM – 20 SLPM options
  • 11.5-160 PSIA operating
  • ±0.5% of reading accuracy
  • Drop-in replacement
  • -SFF option: machined fittings

Spec Sheets

Build Options for Mass Flow Meters and Controllers

Communication Protocols
RS-232 Serial (default)
RS-485 Serial
Analog
(4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
IO-Link
Displays
Backlit monochrome (default) or TFT color; integrated or panel-mount; none
Process Connections
10-32, NPT, SAE, BSPP, VCRM, VCO, Compression
Ingress Protection
IP40 default; IP66, IP67
Hazardous environment ratings
CSA Class 1 Div 2, ATEX Class 1 Zone 2
Humid gases
Relative humidity compensation

Downloads

Manuals

M/MC Series Operating ManualLatest – 10v firmware

M Series Operating ManualLegacy – 8v firmware (2020)

M Series Operating ManualLegacy – 9v firmware (2021)

MC Series Operating ManualLegacy – 8v firmware (2020)

MC Series Operating ManualLegacy – 9v firmware (2021)

Brochures

M/MC Series Brochure

Software/Utilities

FlowVision 2.0

LabVIEW Driver LibraryLatest – Compatible with LabVIEW 2014+
LabVIEW Driver LibraryLegacy – Compatible with LabVIEW 2010
LabVIEW Driver LibraryLegacy – Compatible with LabVIEW 8.0

Serial Terminal Utility

Serial Address Dump Utility

Serial Port Troubleshooter Utility

Python Library

CODA coriolis mass flow meter

Liquid Flow Meters & Liquid Flow Controllers

Liquid flow meters and liquid flow controllers use either Coriolis or laminar flow technology to accurately control liquid flows across a wide range of applications.

Dual valve pressure controller 5 PSIG

Pressure Controllers & Transducers

Alicat offers pressure controllers and pressure transducers for use in flowing, dead-ended, or vacuum applications.

Custom Instrumentation

Order mass flow controllers and meters custom-build to your specific application needs.

Technical Reference

Find guides, tutorials, pinout diagrams, and industrial protocol resources for your Alicat instrument.

Applications

Gas chromatography column inside a GC analyzer

Gas chromatography processes

DALL-E geothermal energy extraction illustration

Mining, oil and gas, and hydrogen production

Bioprocessing mass flow controller

Bioreactors and fermentation

Diamond mass flow controllers

Lab-grown diamonds with chemical vapor deposition

FastTrack Ordering

M/MC mass flow meters and controllers that ship in just 3-5 business days.
CALIBRATION
Standard or High Accuracy
DISPLAY
Monochrome, Color, or None
PROTOCOL
Analog, RS-232, RS-485, or Modbus RTU
CONNECTOR
MD8, Locking Industrial, DB9M, DB15
FITTINGS
NPT

METER RANGES

2 SCCM - 500SLPM

CONTROLLER RANGES

2 SCCM - 100SLPM

Service and Support

Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade,
you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.