Mass Flow Meters
M Series
For most gas measurement
most versatile
- 0.5 SCCM- 10,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
- ±(0.1% of reading + 0.02% of full scale) repeatability
Spec Sheets
MQ Series
Measure flow rates at higher pressures
Highest pressure rating
- 10 SCCM- 10,000 SLPM options
- 11.5-320 PSIA operating
- ±0.5% of reading accuracy
- ±0.1% of full scale repeatability
Spec Sheets
BIO Series
Measure gases into and out of bioreactors + fermenters
ASME BPE compliant
- Long-term stability
- Robust, compliant materials
- Designed for scalability (10,000:1 operating range)
Spec Sheets
Mass Flow Controllers
MC Series
For most gas control
Fast proportional control
- 0.5 SCCM- 10,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
- 0.01–100% of full scale control
- 30 ms control response
Spec Sheets
MCQ Series
Control gas at higher pressures
Highest pressure rating
- 10 SCCM- 10,000 SLPM options
- 11.5-320 PSIA operating
- ±0.6% of reading accuracy
- 0.5% – 100% of full scale control
- 100 ms control response
Spec Sheets
BIOC Series
Control gases into bioreactors + fermenters
ASME BPE compliant
- Long-term stability
- Robust, compliant materials
- Designed for scalability (10,000:1 operating range)
Spec Sheets
MCD Series
Control flow in two directions
Bidirectional Control
- 0.5 SCCM- 3,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
Spec Sheets
MCT Series
Switch between two gas streams
two gas sources, one device
- 98 gases
- 0.5 SCCM- 10,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
Spec Sheets
MCV Series
Control gas at vacuum pressures
Pnuematic shutoff valve
- Ensure process integrity
- 0.5 SCCM- 20 SLPM options
- ±(0.1% of reading + 0.02% of full scale) repeatability
Spec Sheets
MCE Series
Control gases at vacuum with SEMI form factor
SEMI form factor -1/4″ VCR
- 0.5 SCCM – 20 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
- Drop-in replacement
- -SFF option: machined fittings
Spec Sheets
Build Options for Mass Flow Meters and Controllers
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
IO-Link
Downloads
Manuals
M/MC Series Operating ManualLatest – 10v firmware
M Series Operating ManualLegacy – 8v firmware (2020)
M Series Operating ManualLegacy – 9v firmware (2021)
MC Series Operating ManualLegacy – 8v firmware (2020)
MC Series Operating ManualLegacy – 9v firmware (2021)
Brochures
M/MC Series Brochure
Software/Utilities
FlowVision 2.0
Serial Terminal Utility
Serial Address Dump Utility
Serial Port Troubleshooter Utility
Python Library
Liquid Flow Meters & Liquid Flow Controllers
Liquid flow meters and liquid flow controllers use either Coriolis or laminar flow technology to accurately control liquid flows across a wide range of applications.
Pressure Controllers & Transducers
Alicat offers pressure controllers and pressure transducers for use in flowing, dead-ended, or vacuum applications.
Custom Instrumentation
Order mass flow controllers and meters custom-build to your specific application needs.
Technical Reference
Find guides, tutorials, pinout diagrams, and industrial protocol resources for your Alicat instrument.
Applications
Gas chromatography processes
Mining, oil and gas, and hydrogen production
Bioreactors and fermentation
Lab-grown diamonds with chemical vapor deposition
FastTrack Ordering
METER RANGES
2 SCCM - 500SLPM
CONTROLLER RANGES
2 SCCM - 100SLPM
Service and Support
Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade,
you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.