Anti-Corrosive Mass Flow Meters
MS Series Meter
For most applications
most versatile
- 130 gases, including corrosives
- 0.5 SCCM- 10,000 SLPM
- 11.5-160 PSIA
- ± 0.4% of reading and ± 0.2% of full scale accuracy
Spec Sheets
Anti-Corrosive Mass Flow Controllers
MCS Series Controller
For most applications
integrated pneumatic valve
- 0.5 SCCM- 10,000 SLPM options
- 1 – 100% of full scale control range
- 30 ms control response
Spec Sheets
MCES Series Controller
For SEMI vacuum applications
SEMI form factor -1/4″ VCR
- 0.5 SCCM – 20 SLPM options
- 11.5-160 PSIA operating
- 1 – 100% of full scale control range
- 30 ms control response
- Drop-in replacement
Spec Sheets
MCVS Series Controller
For vacuum applications
Pnuematic shutoff valve
- Ensure process integrity
- 0.5 SCCM- 20 SLPM options
- ±0.2% of full scale repeatability
Spec Sheets
MCDS Series Controller
For bi-directional flow applications
Control in both directions
- 0.5 SCCM- 3,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
Spec Sheets
MCTS Series Controller
For selectable steam control
two gas sources, one device
- 0.5 SCCM- 10,000 SLPM options
- 11.5-160 PSIA operating
- ±0.5% of reading accuracy
Spec Sheets
Build Options for Mass Flow Meters and Controllers
RS-485 Serial
Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc)
Modbus RTU (over RS-232 or RS-485)
Modbus TCP/IP
DeviceNet
EtherCAT
EtherNet/IP
PROFIBUS
PROFINET
IO-Link
Downloads
Manuals
MS/MCS Series Operating ManualLatest – 10v firmware
MS Series Operating ManualLegacy – 8v firmware (2020)
MS Series Operating ManualLegacy – 9v firmware (2021)
MCS Series Operating ManualLegacy – 8v firmware (2020)
MCS Series Operating ManualLegacy – 9v firmware (2021)
Brochures
MS/MCS Series Brochure
Software/Utilities
FlowVision 2.0
Serial Terminal Utility
Serial Address Dump Utility
Serial Port Troubleshooter Utility
Python Library
Liquid Flow Meters & Controllers
Liquid flow controllers use either Coriolis or laminar flow technology to accurately control liquid flows across a wide range of applications.
Pressure Controllers & Transducers
Alicat offers pressure controllers for use in flowing, dead-ended, or vacuum applications.
Custom Instrumentation
Order mass flow controllers and meters custom-build to your specific application needs.
Technical Reference
Find guides, tutorials, pinout diagrams, and industrial protocol resources for your Alicat instrument.
Applications
Gas chromatography processes
Mining, oil and gas, and hydrogen production
Bioreactors and fermentation
Lab-grown diamonds with chemical vapor deposition
FastTrack Ordering
METER RANGES
2 SCCM - 500SLPM
CONTROLLER RANGES
2 SCCM - 100SLPM
Service and Support
Whether it is time for your instrument’s annual recalibration or your instrument needs a repair or upgrade,
you can fill out the Service Request Form below, email us, call us, or start a live chat session to get the service process started.