Hydrogen Mass Flow Meters & Controllers

M Series

For most gas measurement

most versatile

• 0.5 SCCM- 10,000 SLPM options
• 11.5-160 PSIA operating
• ±0.5% of reading accuracy
• ±(0.1% of reading + 0.02% of full scale) repeatability

Spec Sheets

• 0.5 SCCM – 10 SCCM
• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

MQ Series

For higher pressures

Up to 320 PSIA

• 10 SCCM- 10,000 SLPM options
• 11.5-320 PSIA operating
• ±0.5% of reading accuracy
• ±0.1% of full scale repeatability

Spec Sheets

• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

For ultra-high pressure

Up to 4,000 PSIA

• Coriolis technology
• High or standard accuracy
• Measures mass flow, density, and temperature

Spec Sheets

• 40 g/h – 300 kg/h

MC Series

For most gas control

Fast proportional control

• 0.5 SCCM- 10,000 SLPM options
• 11.5-160 PSIA operating
• ±0.5% of reading accuracy
• 0.01–100% of full scale control
• 30 ms control response

Spec Sheets

• 0.5 SCCM – 5 SCCM
• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

MCQ Series

For higher-pressure

Up to 320 PSIA

• 10 SCCM- 10,000 SLPM options
• 11.5-320 PSIA operating
• ±0.6% of reading accuracy
• 0.5% – 100% of full scale control
• 100 ms control response

Spec Sheets

• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

For ultra-high pressure

Up to 4,000 PSIA

• Coriolis technology
• High or standard accuracy
• Measures mass flow, density, and temperature
• <140 ms control response
• 2-100% of full scale control range (50:1 turndown)

Spec Sheets

• 40 g/h – 300 kg/h

M/MC Series Operating ManualLatest – 10v firmware

M Series Operating ManualLegacy – 8v firmware (2020)

M Series Operating ManualLegacy – 9v firmware (2021)

MC Series Operating ManualLegacy – 8v firmware (2020)

MC Series Operating ManualLegacy – 9v firmware (2021)

BASIS Operating ManualLatest

CODA Operating ManualLatest

M/MC Series Brochure

BASIS Brochure

CODA Brochure

FlowVision 2.0

Serial Terminal Utility

Serial Address Dump Utility

Serial Port Troubleshooter Utility

Python Library