MC Series Controllers

• 0.5 SCCM full scale – 10,000 SLPM full scale options
• 11.5 – 160 PSIA operating
• Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
• 0.01% – 100% control range (10,000:1 turndown)
• As fast as 30 ms control response

• 0.5 – 5 SCCM
• 10 SCCM – 20 SLPM
• 50 – 10,000 SLPM

Reduced Wetted Materials

• Up to 130 corrosive and non‑corrosive gas calibrations preloaded
• 0.5 SCCM full scale – 10,000 SLPM full scale options
• Accuracy as good as ± 0.4% of reading and ± 0.2% of full scale
• 1 – 100% of full scale control range
• As fast as 30 ms control response

• 0.5 SCCM – 10,000 SLPM

• 10 SCCM full scale – 10,000 SLPM full scale options
• 11.5 – 320 PSIA operating
• Accuracy as good as ± 0.6% of reading or ± 0.1% of full scale, whichever is greater
• 0.5% – 100% of full scale control (200:1 turndown)
• 100 ms control response

• 10 SCCM – 20 SLPM
• 50 – 10,000 SLPM

• 0.5 SCCM full scale – 3,000 SLPM full scale options
• 11.5 – 160 PSIA operating
• Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
• Reference specs for MC, corrosion-resistant MCS, low pressure drop MCW, or high pressure MCQ. Performance is the same, but dimensions will change with addition of valve.

TWO SOURCES, ONE DEVICE

• 98 gases
• 0.5 SCCM full scale – 3,000 SLPM full scale options
• 11.5 – 160 PSIA operating
• Accuracy as good as ± 0.5% of reading or ± 0.1% of full scale, whichever is greater
• Reference specs for MC, corrosion-resistant MCS, low pressure drop MCW, or high pressure MCQ. Performance is the same, but dimensions will change with addition of valve.