M/MC Series

M Series

For most gas measurement

most versatile

• 0.5 SCCM- 10,000 SLPM options
• 11.5-160 PSIA operating
• ±0.5% of reading accuracy
• ±(0.1% of reading + 0.02% of full scale) repeatability

Spec Sheets

• 0.5 SCCM – 10 SCCM
• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

MQ Series

Measure flow rates at higher pressures

Highest pressure rating

• 10 SCCM- 10,000 SLPM options
• 11.5-320 PSIA operating
• ±0.5% of reading accuracy
• ±0.1% of full scale repeatability

Spec Sheets

• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

BIO Series

Measure gases into and out of bioreactors + fermenters

ASME BPE compliant

• Long-term stability
• Robust, compliant materials
• Designed for scalability (10,000:1 operating range)

Spec Sheets

• 1 SCCM – 5 SCCM
• 10 SCCM – 20 SLPM
• 20 SLPM – 500 SLPM

MC Series

For most gas control

Fast proportional control

• 0.5 SCCM- 10,000 SLPM options
• 11.5-160 PSIA operating
• ±0.5% of reading accuracy
• 0.01–100% of full scale control
• 30 ms control response

Spec Sheets

• 0.5 SCCM – 5 SCCM
• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

MCQ Series

Control gas at higher pressures

Highest pressure rating

• 10 SCCM- 10,000 SLPM options
• 11.5-320 PSIA operating
• ±0.6% of reading accuracy
• 0.5% – 100% of full scale control
• 100 ms control response

Spec Sheets

• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

BIOC Series

Control gases into bioreactors + fermenters

ASME BPE compliant

• Long-term stability
• Robust, compliant materials
• Designed for scalability (10,000:1 operating range)

Spec Sheets

• 1 SCCM – 5 SCCM
• 10 SCCM – 20 SLPM
• 50 SLPM – 500 SLPM

MCT Series

Control two gas streams

two gas sources, one device

• 98 gases
• 0.5 SCCM- 10,000 SLPM options
• 11.5-160 PSIA operating
• ±0.5% of reading accuracy

Spec Sheets

• 0.5 SCCM – 5 SCCM
• 10 SCCM – 20 SLPM
• 50 SLPM – 10,000 SLPM

MCV Series

Control gas at vacuum pressures

Pnuematic shutoff valve

• Ensure process integrity
• 0.5 SCCM- 20 SLPM options
• ±(0.1% of reading + 0.02% of full scale) repeatability

Spec Sheets

• 0.5 SCCM – 5 SCCM
• 10 SCCM – 20 SLPM

MCE Series

Control gases at vacuum with SEMI form factor

SEMI form factor -1/4″ VCR

• 0.5 SCCM – 20 SLPM options
• 11.5-160 PSIA operating
• ±0.5% of reading accuracy
• Drop-in replacement
• -SFF option: machined fittings

Spec Sheets

• MCE: 0.5 SCCM – 5 SCCM
• MCE: 10 SCCM – 20 SLPM
• SFF: 0.5 SCCM – 5 SCCM
• SFF: 10 SCCM – 20 SLPM

M/MC Series Operating ManualLatest – 10v firmware

M Series Operating ManualLegacy – 8v firmware (2020)

M Series Operating ManualLegacy – 9v firmware (2021)

MC Series Operating ManualLegacy – 8v firmware (2020)

MC Series Operating ManualLegacy – 9v firmware (2021)

M/MC Series Brochure

FlowVision 2.0

Serial Terminal Utility

Serial Address Dump Utility

Serial Port Troubleshooter Utility

Python Library