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Technical Reference

Mass Flow
Liquid Flow
Pressure
Accessories
Downloads
Pinouts
Mass Flow Liquid Flow Pressure Accessories Downloads Pinouts
Meters/Calibrators
Controllers
Meters
Controllers
Transducers
Controllers
Multi-Drop Boxes
Remote Displays
Software
Protocols

Gas Select List

Engineering Units

Brochures

Certifications

Tutorials

Part Number Decoder

Mass Flow

Meters and Calibrators

Manuals
Quick Starts
Specification Sheets
B-Series (BASIS™)
Compact OEM mass flow meters
Manuals
Manual
Legacy Manual
Quick Starts
---
Spec Sheets

All Flow Ranges

100 SCCM to 100 SLPM
BIO-Series
Bio industry flow meters
Manuals
Manual
Quick Starts
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IN
Spec Sheets

Low Flow

1 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 500 SLPM
FP-25
Flow standard for PM air samplers
Manuals
Manual
Quick Starts
---
Spec Sheets

All Flow Ranges

Up to 25 SLPM
ISM-Series (IS-MAX™)
Intrinsically safe flow meters
Manuals
Manual
Safe Installation Manual
Quick Starts
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US
Spec Sheets

All Flow Ranges

0.5 SCCM to 5,000 SLPM
ISMS-Series (IS-MAX™)

Corrosion resistant intrinsically safe flow meters

Manuals
Manual
Safe Installation Manual
Quick Starts
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US
Spec Sheets

All Flow Ranges

0.5 SCCM to 5,000 SLPM
K-Series (CODA™)
Coriolis flow meters
Manuals
Manual
2021 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

40 g/h to 300 kg/h
M-Series
Standard mass flow meters
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 10,000 SLPM
MB-Series
Portable standard mass flow meters
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 10,000 SLPM
MQ-Series
High pressure mass flow meters
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 10,000 SLPM
MBQ-Series
Portable high pressure mass flow meters
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 10,000 SLPM
MS-Series
Anti-corrosive mass flow meters
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 SCCM to 10,000 SLPM
MBS-Series
Portable anti-corrosive mass flow meters
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 SCCM to 10,000 SLPM
MW-Series (Whisper™)
Low pressure drop mass flow meters
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 100 SLPM

High Flow

250 SLPM to 1,000 SLPM
MWB-Series (Whisper™)
Portable low pressure drop mass flow meters
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 100 SLPM

High Flow

250 SLPM to 1,000 SLPM

Controllers

BC-Series (BASIS™)
Compact OEM mass flow controllers
Manuals
Manual
Legacy Manual
Quick Starts
---
Spec Sheets

All Flow Ranges

100 SCCM to 100 SLPM
BIO-Series
Bio industry flow controllers
Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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US
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EU
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CN
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IN
Spec Sheets

Low Flow

1 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 500 SLPM
ISMC-Series (IS-MAX™)
Intrinsically safe flow controllers
Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Flow Ranges

0.5 SCCM to 250 SLPM
ISMCQ-Series (IS-MAX™)

Higher Pressure intrinsically safe flow controllers

Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Flow Ranges

0.5 SCCM to 2 SLPM
ISMCS-Series (IS-MAX™)

Corrosion resistant intrinsically safe flow controllers

Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Flow Ranges

0.5 SCCM to 100 SLPM
KC-Series (CODA™)
Coriolis flow controllers
Manuals
Manual
2021 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

40 g/h to 300 kg/h
KF-Series (CODA™)
Coriolis pump controllers
Manuals
Manual
2021 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

40 g/h to 300 kg/h
KG-Series (CODA™)
Coriolis mass flow pump systems
Manuals
Manual
2021 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

1 kg/h to 100 kg/h
MC / MCP / MCR-Series

Standard mass flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 10,000 SLPM
MCD / MCRD-Series

Bidirectional mass flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 3,000 SLPM
MCDS-Series

Anti-corrosive bidirectional controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 3,000 SLPM
MCDW-Series

Low pressure drop bidirectional controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 SCCM to 500 SLPM
MCE-Series

SEMI compatible mass flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM
MCES-Series

Anti-corrosive SEMI compatible controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 SCCM to 20 SLPM
MCQ-Series

High pressure mass flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 10,000 SLPM
MCS / MCRS-Series

Anti-corrosive mass flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 SCCM to 10,000 SLPM
MCT-Series

Selectable-stream flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

High Flow

50 SLPM to 10,000 SLPM
MCTS-Series

Anti-corrosive selectable-stream controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 SCCM to 10,000 SLPM
MCTW-Series

Low pressure drop selectable-stream controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 100 SLPM

High Flow

250 SLPM to 1,000 SLPM
MCV-Series

Vacuum mass flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM
MCVS-Series

Anti-corrosive vacuum mass flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 SCCM to 20 SLPM
MCW-Series (Whisper™)

Low pressure drop mass flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 100 SLPM

High Flow

250 SLPM to 1,000 SLPM
Pascal

Flow controllers for lab-grown diamonds

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM
SFF-Series

SEMI compatible vacuum coating controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

Low Flow

0.5 SCCM to 5 SCCM

Mid Flow

10 SCCM to 20 SLPM

Liquid Flow

Meters

Manuals
Quick Starts
Specification Sheets
K-Series (CODA™)

Coriolis flow meters

Manuals
Manual
2021 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

40 g/h to 300 kg/h
L-Series

Liquid flow meters

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM
LB-Series

Portable liquid flow meters

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM
LBS-Series

Portable anti-corrosive liquid flow meters

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM
LS-Series

Anti-corrosive liquid flow meters

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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US
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM

Controllers

KC-Series (CODA™)

Coriolis flow controllers

Manuals
Manual
2021 Manual
Quick Starts
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US
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

40 g/h to 300 kg/h
KF-Series (CODA™)

Coriolis pump controllers

Manuals
Manual
2021 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

40 g/h to 300 kg/h
KG-Series (CODA™)

Coriolis liquid pump systems

Manuals
Manual
2021 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

1 kg/h to 100 kg/h
LC-Series

Liquid flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM
LCD-Series

Bi-directional liquid flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM
LCT-Series

Selectable-stream liquid flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM
LCS-Series

Anti-corrosive liquid flow controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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US
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM
LCDS-Series

Bi-directional anti-corrosive liquid controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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US
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM
LCTS-Series

Selectable-stream anti-corrosive controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Flow Ranges

0.5 CCM to 10 LPM

Pressure

Transducers

Manuals
Quick Starts
Specification Sheets
EP-Series

OEM pressure transducers

Manuals
Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

1 to 500 PSI
ISP-Series (IS-PRO™)

Intrinsically safe pressure transducers

Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

1 to 3,000 PSI
ISPS-Series (IS-PRO™)

Anti-corrosive ISP-Series transducers

Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

1 to 3,000 PSI
P-Series (PSID)

Standard pressure transducers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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CN
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Spec Sheets

All Pressure Ranges

0.07 to 500 PSI
P-Series (PSIA/PSIG)

Standard pressure transducers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PB-Series (PSID)

Portable pressure transducers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 500 PSI
PB-Series (PSIA/PSIG)

Portable pressure transducers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PS-Series (PSID)

Anti-corrosive pressure transducers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 500 PSI
PS-Series (PSIA/PSIG)

Anti-corrosive pressure transducers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI

Controllers

EPC / EPCD-Series

OEM pressure controllers

Manuals
Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

1 to 500 PSI
ISPC-Series (IS-PRO™)

Intrinsically safe pressure controllers

Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

0.07 to 1,500 PSI
ISPCS-Series (IS-PRO™)

Anti-corrosive ISPC-Series controllers

Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

0.07 to 1,500 PSI
ISPCD-Series (IS-PRO™)

Dual-valve ISPC-Series controllers

Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

0.07 to 1,500 PSI
ISPCDS-Series (IS-PRO™)

Anti-corrosive ISPCD-Series controllers

Manuals
Manual
Safe Installation Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

0.07 to 1,500 PSI
IVC / IVCD-Series

Integrated vacuum controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
---
Spec Sheets

All Pressure Ranges

10 TorrA to 1000 TorrA
PC-Series (PSID)

Standard pressure controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 500 PSI
PC-Series (PSIA/PSIG)

Standard pressure controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PC3-Series

Pressure controllers with remote sensor

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PC3S-Series

Anti-corrosive PC3-Series controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PCD-Series (PSID)

Dual-valve pressure controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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Spec Sheets

All Pressure Ranges

0.07 to 500 PSI
PCD-Series (PSIA/PSIG)

Dual-valve pressure controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PCDS-Series (PSID)

Anti-corrosive dual-valve controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 500 PSI
PCDS-Series (PSIA/PSIG)

Anti-corrosive dual-valve controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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US
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EU
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CN
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Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PCD3-Series

Dual-valve controllers with remote sensor

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PCD3S-Series

Anti-corrosive PCD3 controller

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI
PCS-Series (PSID)

Anti-corrosive pressure controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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IN
Spec Sheets

All Pressure Ranges

0.07 to 500 PSI
PCS-Series (PSIA/PSIG)

Anti-corrosive pressure controllers

Manuals
Manual
2021 Manual (9v)
2020 Manual
Quick Starts
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EU
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CN
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Spec Sheets

All Pressure Ranges

0.07 to 3,000 PSI

Accessories

Multi-Drop Boxes

Manuals
Quick Starts
Downloads
Breakout boxes BB9-232, BB8-DB9, BB3-232

9-port, 8-port, and 3-port USB multi-drop box

Manuals
Manual
Quick Starts
---
Downloads
---

Remote Displays

RD

Remote display for Alicat devices

Manuals
---
Quick Starts
---
Downloads

Panel Cutout Template

96 KB (.PDF)
RDE

Remote display enclosure for Alicat devices

Manuals
---
Quick Starts
---
Downloads

Panel Cutout Template

62 KB (.PDF)
CODA Display

Remote display for CODA™ devices

Manuals
---
Quick Starts
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Downloads

Downloads

Software + Utilities

Manuals
Resources
Downloads
Alicat Serial Terminal

Command-line utility for serial communication

Manuals
Tutorial
Downloads

Portable

23 KB
COM Port Troubleshooter

Utility for troubleshooting communication issues

Manuals
---
Downloads

Portable

4 KB
FlowVision™ 2.0

Free all-in-one command and control software suite

Manuals
Manual
Downloads

Installer (Windows)

23 MB

.NET (x64)

Core 3.1.32

.NET (x86)

Core 3.1.32
FlowVision™ SC

Legacy software suite for older PCs

Manuals
Manual
Downloads

Installer (7/8/8.1)

64 MB

Installer (XP/Vista)

3.4 MB

.NET

v4.6.1
FlowVision™ Script Converter

Utility to convert scripts to FlowVision SC format

Manuals
---
Downloads

Portable

1 MB
FlowVision™ MX

Basic gas mixing software

Manuals
Manual
Downloads
---
LabVIEW Drivers

Compatible with LabVIEW 2014+

Manuals
Manual
Downloads

v2 (.zip)

9.1 MB

LabVIEW Runtime

ni.com
LabVIEW 2010 Drivers

Compatible with LabVIEW 2010

Manuals
Manual
Downloads

v2 (.zip)

6.8 MB

LabVIEW Runtime

ni.com
LabVIEW 8.0 Drivers

Compatible with LabVIEW 8.0

Manuals
Manual
Downloads

v2 (.zip)

7.4 MB

LabVIEW Runtime

ni.com
USB Drivers

Virtual COM port drivers

Manuals
---
Downloads

v2.12.36.4

2 MB

Legacy BB9-USB Driver

5 MB
Python Library

Third-party drivers by NuMat Technologies

Manuals
---
Tutorial
Downloads

GitHub Repository

numat/alicat
Serial Address Dump Utility

Logs an Alicat’s register configuration

Manuals
---
Tutorial
Downloads

Portable

4 KB

Communication Protocols

Alicat ASCII

Standard on most devices

Manuals
Manual
Resources
Tutorial
Downloads
---
DeviceNet

Common for factories and PLC automation

Manuals
Manual
Resources
FAQ
Conformance
Downloads

EDS File

10 KB (.ZIP)
EtherCAT

Fastest industrial protocol over Ethernet

Manuals
Manual
Resources
FAQ
Downloads

ESI File

51 KB (.ZIP)
EtherNet/IP

Supports an unlimited number of devices

Manuals
Manual
Resources
FAQ
Conformance
Downloads

EDS File

15 KB (.ZIP)

EIP-Command

Add-on Instructions

EIP-UpdateInput

Add-on Instructions
IO-Link

Point-to-point industrial networking protocol

Manuals
Manual
Resources
FAQ
Conformance
Downloads

IODD Files
Modbus RTU

Standard on most devices

Manuals
Manual
Resources
FAQ
Downloads

MBP File

3.3 KB
Modbus TCP/IP

Simple ethernet protocol for easy integration

Manuals
Manual
Resources
FAQ
Downloads

MBP File

3.3 KB
PROFIBUS DP-V0

For instruments built after July 12, 2020

Manuals
Manual
Resources
FAQ
Downloads

GSD File

5 KB (.ZIP)
PROFIBUS

For instruments built before July 12, 2020

Manuals
Manual
Resources
FAQ
Downloads

GSD File

13 KB (.ZIP)
PROFINET

For M, L, P series devices

Manuals
Manual
Resources
FAQ
Certification
Downloads

GSD File

5 KB (.ZIP)
PROFINET

For CODA series devices

Manuals
Resources
FAQ
Certification
Downloads

GSD File

3 KB (.ZIP)